Comparison ledger
CEE 100, EV Group IQ Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100CEE | IQ MaskEV Group |
|---|---|---|
| OEM | CEE | EV Group |
| Category | Lithography | Lithography |
| Wafer size | 6" | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices. |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 100 | EV Group IQ Mask |
| Cited variants |
| — |
| Specifications | ||
| Tool type | Spray Developer[1] | — |
| Accepts wafer size | up to 6" wafers[2] | — |
| Programmable programs | 10 programs[2] | — |
| Steps per program | up to 10 steps[2] | — |
| Programmable step parameters | Acceleration, Speed, Time[2] | — |
| Associated document | CEE Model 100CB Spinner.doc[2] | — |
| Wafer size | Up to 6 inches[2] | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.[3] |
| Programs | 10 programs each with up to 10 steps[2] | — |
| Control parameters | Acceleration, Speed, Time[2] | — |
| Configuration | — | Dual end effector robot handling configuration.[3] |
| Reinforced stage drives | — | X/Y/Theta axis Internal wedge compensation unit: Automatic wedge compensation Substrate and mask.[3] |
| Power | — | 500W or 1000W Hg lamps house Optical sets:[3] |
| OEM | — | EV Group[3] |
| Model | — | IQ Mask[3] |
| Category | — | Lithography[4] |
| Handling configuration | — | Dual end effector robot handling configuration[3] |
| Alignment stage | — | Motorized alignment stage with precision guided X, Y, T alignment[3] |
| Wedge compensation | — | Automatic wedge compensation[3] |
| Optics / lamps | — | 500W or 1000W Hg lamps house optical sets[3] |
| Microscope | — | Fully motorized split field microscope with high resolution CCD camera[3] |
| Bottom side microscope | — | Fully motorized split field microscope for bottom side viewing with high resolution CCD camera[3] |
| Control | — | Complete computer control for operator interface and alignment functions[3] |
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