Comparison ledger
CEE 1000 Hot Plate, YES 6112, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6112YES | |
|---|---|---|
| OEM | CEE | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 8 in. wafers |
| Process node | — | — |
| Introduced | — | 2000 |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | YES 6112 |
| Specifications | ||
| Configuration | 4"[1] | — |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| Capacity | — | 4 cassettes of 8 in. wafers[2] |
| Cleanliness | — | < 10 x 0.5 - micron particles per 8-in. wafer[2] |
| Throughput | — | 2 full loads/hr.[2] |
| HMDS usage | — | <7 ml/200 wafers (>50 prime cycles/pint)[2] |
| Temperature | — | 160°C max[2] |
| Outer system | — | stainless steel[2] |
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