Waferpedia

Comparison ledger

1100 FX Hot Plateversus1100 Hot Plate

CEE 1100 FX Hot Plate, CEE 1100 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEECEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1100CEE 1100
Specifications
Configuration300 degrees C maximum bake temperature[1]1725 Watts[2]
Substrate size150 to 300mm[1]—
Voltage240V, 1Ph, 60Hz[1]115V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing