Comparison ledger
Disco 321, Disco 840, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | 840Disco |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco 840 |
| Cited variants | — |
|
| Specifications | ||
| OEM | Disco[2] | — |
| Model | 321[2] | — |
| Equipment type | Wafer Dicing Saw[2] | — |
| Facility context | Cleanroom Instrumentation[2] | — |
| Application area | Nano and Micro Fabrication[2] | — |
| Location | FNT 4.106[2] | — |
| Wafer Size | Up to 6 inches[3] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[4] | — |
| Spindle Power (alternate) | 1500 Watt spindle[3] | — |
| Non-Contact Setup | Non Contact Setup[4] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[4] | — |
| Broken Blade Detection | Broken Blade Detection[4] | — |
| Light Tower | Includes Light Tower[4] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[3] | — |
| Wafer size capability | Up to 6" wafers[4] | — |
| Chuck | 6-inch porous film frame chuck[3] | — |
| Spindle power | 1500-watt spindle[3] | — |
| Footprint | Small footprint[3] | — |
| Setup | Non-contact setup[4] | — |
| Blade break detection | Broken blade detection[4] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[4] | — |
| Wafer size range | — | 4–8 inch[1] |
| Spindle speed | — | 1000–7000 rpm[1] |
| Vertical stroke | — | 110 mm[1] |
| Planarity accuracy within wafer | — | 0.0015 mm[1] |
| Chuck table type | — | Porous vacuum chuck[1] |
| Grinding wheel diameter | — | 8 inch[1] |
| Number of cassettes | — | 2[1] |
| Number of spindles | — | 2 (independently adjustable)[1] |
| Dimensions (W × D × H) | — | 1050 × 2150 × 1710 mm[1] |
| Electrical supply | — | 200 V, 3 phase, 50/60 Hz[1] |
| CDA supply | — | 0.5–0.8 MPa[1] |
| DI water supply | — | 0.2–0.3 MPa, 15 l/min or higher[1] |
| Oil mist filtration system (optional) | — | Pure Boyd PBH 100[5] |
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