Comparison ledger
Hitachi S 4800 I, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 4800 IHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4800 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Main body | 1set including Tip, Objective aperture, Ion Pump, SE detection etc.[1] | — |
| Diplay unit | 1set including PC, monitor, keyboard, mouse, etc[1] | — |
| Chiller | Option if there is no water source[1] | — |
| Resolution | 1.0 nm (Accelerating voltage: 15 kV, WD: 4mm; 2.0 nm (Accelerating voltage: 1 kV, WD: 1.5 mm)[1] | — |
| Magnification | 30 to 2,000x in LM mode; 100 to 800,000 in HM mode[1] | — |
| Configuration | Tilt motion：-5° to +70°[1] | NIST Traceable[2] |
| Resolution (15 kV, WD 4mm) | 1.0 nm[1] | — |
| Resolution (1 kV, WD 1.5 mm) | 2.0 nm[1] | — |
| Magnification (LM mode) | 30 to 2,000x[1] | — |
| Magnification (HM mode) | 100 to 800,000x[1] | — |
| Tilt motion | -5° to +70°[1] | — |
| Operating system | Windows 2000[1] | — |
| Main body components | Tip, Objective aperture, Ion pump, SE detection[1] | — |
| Display unit components | PC, monitor, keyboard, mouse[1] | — |
| Wafer Size | — | 8 inch[2] |
| NIST Traceable | — | True[2] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[3] |
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