Comparison ledger
KLA 1.112 PSL Wafer, KLA 2367 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 2367 |
| Specifications | ||
| Configuration | NIST Traceable[1] | ORS Upgrade[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Power Requirements | — | 208 V, 16 A, 50 / 60 Hz, 3 Phase[3] |
| CE Marked | — | Yes[3] |
| OEM | — | KLA[3] |
| Model | — | 2367 Brightfield[3] |
| Category | — | Metrology & Inspection[4] |
| Description | — | brightfield inspection system[4] |
| Wafer support | — | 200 mm cassettes[3] |
| Cassette HW | — | 25 cassette HW 200 mm[3] |
| Model support | — | GEM/SECS and HSMS[3] |
| Pixels enabled | — | .12, .62, .39[3] |
| Vintage | — | 2017[3] |
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