Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI Nova NanoSEM 600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Nova NanoSEM 600Thermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI Nova NanoSEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | High Resolution[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Instrument type | — | Scanning electron microscope[3] |
| Imaging | — | High-resolution[3] |
| Electron source | — | Schottky FEG[3] |
| Vacuum modes | — | Works in high and low vacuum[3] |
| STEM mode resolution | — | As low as 1 nanometer[3] |
| Mode | — | STEM mode[3] |
| Stage | — | 150 mm stage[3] |
| Chamber | — | Large chamber[3] |
| Analytical capability | — | Easy to add analytical capability[3] |
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