Comparison ledger
KLA .204 PSL Wafer, Nikon L 200 N, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | L 200 NNikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | w/ TH 200 Wafer Loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon L 200 N |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Wafer size | — | w/ TH 200 Wafer Loader[3] |
| OEM | — | Nikon[3] |
| Model | — | L 200 N[3] |
| Equipment type | — | Microscope[3] |
| Wafer loader | — | TH 200 Wafer Loader[3] |
| Inspection use | — | Inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, and other substrates[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →