Comparison ledger
KLA HRP 220, KLA HRP 220 Computer, KLA HRP 220 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HRP 220KLA | ||
|---|---|---|---|
| OEM | KLA | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | KLA HRP 220 | KLA HRP 220 | KLA HRP 220 |
| Specifications | |||
| Voltage | 115 V[1] | — | — |
| Configuration | 6 A[1] | Full PC set (Include Tencor Board) with Installed Program[4] | KIT, SENSOR ASSY, REPLACEMENT HRP 200[5] |
| Frequency | 60 Hz[1] | — | — |
| Category | Metrology & Inspection[2] | — | — |
| Tool type | Surface profilometer[2] | — | — |
| Model | HRP 220[1] | — | HRP 220[5] |
| Wafer size | 8 inch[1] | — | — |
| Current | 6 A[1] | — | — |
| Phase | Single Phase[1] | — | — |
| Measurement capability | In-line surface measurement[3] | — | — |
| Vertical resolution | Better than 1 nm[3] | — | — |
| Analysis software | Answer![3] | — | — |
| Control-system architecture | Windows NT[3] | — | — |
| Make | — | — | KLA[5] |
| Equipment type | — | — | Surface Profilometer[5] |
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