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Comparison ledger

IPEC AvantGaard 776versus1 DP 41

Lam Research IPEC AvantGaard 776, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECLogitech 1 DP 41
Cited variants
  • IPEC AvantGaard 776 Tungsten[1]
  • IPEC AvantGaard 776 (Dielectric)[2]
—
Specifications
ConfigurationDielectric[3]50/60 Hz[5]
CategoryCMP[2]—
MakeLam / IPEC[1]Logitech[5]
ModelAvantGaard 776[2]1 DP 41[5]
Wafer size8 inch[1]—
Wafer size (version)200 mm[4]—
ProcessTungsten[1]—
Asset descriptionCMP system for spares use[4]—
Phase—3 Phase[5]
Voltage—480 V[5]
Frequency—50/60 Hz[5]
Current—12 amps[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing