Waferpedia

Comparison ledger

12 Benchtop Lapping Polishingversus108T

Lapmaster 12 Benchtop Lapping Polishing, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
108TPR Hoffman
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size—up to 12 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 12 Benchtop Lapping PolishingPR Hoffman 108T
Specifications
MakeLapmaster[1]—
Model12[1]—
CategoryCMP[2]—
Type/ApplicationSingle sided[3]—
Plate diameter12 in[3]—
No. of conditioning rings3[4]—
ConfigurationRing lapper[4]—
BaseRigid, lightweight, cast aluminum base[4]—
Standard RPM60 RPM[4]—
RPM range with variable speed drive0-60[4]—
Drive motor - lapper0.5 HP[4]—
Drive motor - polisher0.75 HP[4]—
Length25 in[4]—
Width18 in[4]—
Height24 in[4]—
Estimated shipping weight240 lbs[4]—
Approximate weight135 lbs / 61 kg[5]—
Approximate dimensions24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[5]—
Electrical systemVarious voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[5]—
Motor1/3 hp / 0.25 kW motor with gear reducer[5]—
Abrasive feed systemDesigned for water or oil based lapping slurries[5]—
Automatic cycle timerAutomatic digital cycle timer[5]—
Ring configurationRing lapper[4]—
Ring ID4.25 inches[4]—
carrier type listing—108T 9B - S/F / Lapmaster LSP-9 / etc.[6]
machine class—for double-sided planetary lapping & polishing machines[6]
wafer sizes stated on insert-carrier page—3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[6]
maximum carrier diameter stated on insert-carrier page—up to 33 in diameter[6]
maximum carrier diameter stated on lapping-carrier page—up to 48 in diameter[7]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lapmaster-wolters.comlapmaster-wolters.com
  4. [4]catalog.lapmaster.comcatalog.lapmaster.com
  5. [5]lapmaster-wolters.comlapmaster-wolters.com
  6. [6]web.archive.orgweb.archive.org
  7. [7]web.archive.orgweb.archive.org