Waferpedia

Comparison ledger

120 Continuousversus48 Optical

Lapmaster 120 Continuous, Lapmaster 48 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
48 OpticalLapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousLapmaster 48
Specifications
Phase—3 Phase[1]
Frequency—60Hz[1]
Voltage—208V[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing