Waferpedia

Comparison ledger

120 ContinuousversusPR I 66 T

Lapmaster 120 Continuous, PR Hoffman PR I 66 T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PR I 66 TPR Hoffman
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousPR Hoffman PR I 66 T

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