Waferpedia

Comparison ledger

120 ContinuousversusGUR 1

Lapmaster 120 Continuous, Strasbaugh GUR 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
GUR 1Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh GUR 1

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →