Comparison ledger
SCREEN SPW 813 A, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SPW 813 ASCREEN | 1000FPYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SPW 813 A | YES 1000FP |
| Specifications | ||
| Wafer Sizes | 8 inch[1] | — |
| Product Type | Scrubber[2] | — |
| OEM | SCREEN / DNS[4] | — |
| Model | SPW 813 A[4] | Glen/YES 1000FP[5] |
| Wafer size | 8 inch[4] | — |
| Equipment type | Scrubber[2] | — |
| System type | — | Plasma cleaning system[5] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[5] |
| Designed use | — | Designed to accept a range of shelf sizes[5] |
| Application focus | — | Changing needs of the flat panel industry[5] |
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