Waferpedia

Comparison ledger

100R16versus7 AF

Strasbaugh 100R16, Strasbaugh 7 AF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
7 AFStrasbaugh
OEMStrasbaughStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyStrasbaugh 100R16Strasbaugh 7 AF
Specifications
type1 spindle grinder/polisher[1]—
drive systemDC drive system with 2 motors[1]—
spindle RPM1-180 RPM[1]—
eccentric RPM1-90 RPM[1]—
controlsdigital timer; air down switch; spindle and eccentric speed dials; air regulators[1]—
capacity16 inches[1]—
spindle size1-8 TPI[1]—
overall dimensions28 inches x 36 inches x 48 inches[1]—
weight500 lbs[1]—
originmade in the USA[1]—
Phase—3 Phase[2]
Frequency—60 Hz[2]
OEM—Strasbaugh[3]
Model—7 AF[3]
Tool type—CMP (Chemical Mechanical Polisher)[3]
Electrical—3 Phase, 60 Hz[2]
Wafer size—200 mm[4]
Tapeless backgrinding support—Yes[4]
Compatible wafer types—Bumped and non-bumped wafers[4]
Power supply—3 Phase, 60 Hz[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org