Waferpedia

Comparison ledger

BA 8versusBA 8 Contact

SUSS MicroTec BA 8, SUSS MicroTec BA 8 Contact, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
BA 8SUSS MicroTec
BA 8 ContactSUSS MicroTec
OEMSUSS MicroTecSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec BA 8SUSS MicroTec BA 8
Cited variants—
Specifications
Phase1+N / 2 Phase[2]2 Phase[3]
Configuration50/60 Hz[2]50/60 Hz[3]
Power1kVA[2]—
Voltage—208-230 V[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing