Comparison ledger
Zeiss Leo 1530 FE-SEM, Zeiss Leo 1550, Zeiss LEO 1560, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Leo 1530 FE-SEMZeiss | Leo 1550Zeiss | LEO 1560Zeiss |
|---|---|---|---|
| OEM | Zeiss | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — | 6” wafer loading through the loadlock is possible |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | Zeiss LEO | Zeiss LEO | Zeiss LEO |
| Specifications | |||
| Configuration | Four-Quadrant Backscattered Electron Detector (4QBSD)[1] | Needs a pump[3] | 6" stage and loadlock[4] |
| OXFORD 6901 EDX Detector with resolution | 133 eV at 5.9 KeV[1] | — | — |
| Determination area | 10 mm²[1] | — | — |
| Detectors | Four-Quadrant Backscattered Electron Detector (4QBSD), E-T Detector, In-lens detector[1] | — | In-lens SE and E-T SE detectors[4] |
| EDX Detector | OXFORD 6901 EDX Detector with resolution 133 eV at 5.9 KeV, determination area 10 mm²[1] | — | — |
| Resolution | Sub-nanometer[2] | — | 1 nm at 20 kV[4] |
| Voltage Range | 0.2-30 kV[2] | — | — |
| Maximum Substrate Size | 6 inch[2] | — | — |
| Stage | Motorized x/y/z axes[2] | — | Fully motorized 6-axis eucentric stage[6] |
| Wafer size | — | — | 6” wafer loading through the loadlock is possible[4] |
| Known issues | — | — | Some Flickering on image of chamber scope[5] |
| Accelerating voltage | — | — | 200 V to 30 kV[6] |
| Electron source | — | — | Schottky field emission gun[4] |
| Detector (BSE) | — | — | Robinson backscattered electron detector[6] |
| Airlock | — | — | Integrated 8-inch airlock[6] |
| Maximum wafer loading | — | — | 4 inch via loadlock, 6 inch via chamber door[4] |
| Operating system | — | — | Windows 11[6] |
| Software | — | — | Runs SmartSEM v5[4] |
| Current monitor | — | — | Integrated current monitor on stage[4] |
| Resolution at 20kV | — | — | 1nm[4] |
| Max Wafer Diameter (loadlock) | — | — | 4 inch[4] |
| Max Wafer Diameter (chamber door) | — | — | 6 inch[4] |
| Control Software (if upgraded) | — | — | SEMView8000[7] |
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