Waferpedia

Tool family

ASM Eagle 10 PETEOS

ASM1 entry

Models in this family

  1. The ASM Eagle 10 PETEOS is a semiconductor processing tool for 8 inch wafers, with a vintage of 1999.

    Cited variants

    DesignationGenerationVintageChangesSource
    Version 3———semistarcorp.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]semistarcorp.comsemistarcorp.com