Tool family
ASML Twinscan XT 1250
Models in this family
The ASML Twinscan XT 1250 D is a dry wafer scanner featuring a dual chuck wafer stage and a Cymer XLA165 light source.
The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.
All entries
- Twinscan XT 1250 DASML
The ASML Twinscan XT 1250 D is a dry wafer scanner featuring a dual chuck wafer stage and a Cymer XLA165 light source.
CategoryLithographyWaferContinuous clampable wafer table for dry WSs: Absent35 specs - Twinscan XT 1250 D ArFASML
The ASML Twinscan XT 1250 D is an ArF scanner stated to use 193 nm.
CategoryLithography1 spec