Canon FPA 3000

Models in this family

1. 

   FPA 3000 EX 4

   The Canon FPA 3000 EX 4 is a stepper-type lithography system used for photoresist exposure in semiconductor manufacturing.

2. 

   FPA 3000 EX 5
3. 

   FPA 3000 EX 5 Fine Pattern

   Canon FPA 3000 EX 5 is a fine pattern aligner.

4. 

   FPA 3000 i 4

   The Canon FPA 3000 i 4 is a lithography stepper or fine pattern aligner for semiconductor wafer pattern transfer.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 3000 i 4 Fine Pattern	—	—	Described as a fine pattern aligner.	waferpedia.com[1]

5. 

   FPA 3000 i 4 Fine Pattern

   The Canon FPA 3000 i 4 is a fine pattern aligner.

6. 

   FPA 3000 i 4 i-Line

   Canon FPA 3000 i 4 i-Line Stepper is an 8-inch lithography stepper with i-line designation.

7. 

   FPA 3000 i 5

   The Canon FPA 3000 i 5 is a stepper used in semiconductor manufacturing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 3000 i 5 +	—	—	Intended for 8-inch wafers with notch alignment and L-type transfer; uses Canon's reticle cassette; no additional reticle library; no PPC unit; software version V13.06B.06; some units include a Rasco TBW-CD-83 transfer module with Compact Chamber (2000 vintage).	Equipment inventory listing[2]

8. 

   FPA 3000 i 5 + Fine Pattern

   Canon FPA 3000 i 5 + Fine Pattern is a lithography aligner described with a 6-inch wafer size.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Canon FPA 3000 i 5 + Fine Pattern Aligner	—	—	Listed with a plus sign in the model name.	Equipment inventory listing[3]
   FPA 3000 i 5 + Fine Pattern Aligner	i-line	—	Includes 'Fine Pattern' capability	Equipment inventory listing[3]

9. 

   FPA 3000 i 5 ++ i-Line

   The Canon FPA 3000 i 5 ++ is an i-line stepper designed for 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 3000 i 5 +	i-line	—	—	Equipment inventory listing[4]
   FPA 3000 i 5 (refurbished for 150mm sapphire)	—	—	Refurbished to run 150mm sapphire	Equipment inventory listing[5]

10. 

    FPA 3000 iW

    The Canon FPA 3000 iW is a lithography stepper. The Canon FPA 3000 iW is specified with i-line exposure at 365 nm, 200 V input, 50/60 Hz, 3-phase power, and 29 kVA.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Canon FPA 3000 iW Fine Pattern	—	—	—	waferpedia.com[6]

Sources