Canon FPA 5500

Models in this family

1. FPA 5500

   The Canon FPA 5500 is a stepper used in semiconductor lithography.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 5500 iZa MUV	—	2006	—	waferpedia.com[1]

2. 

   FPA 5500 iZ+ i-Line

   The Canon FPA 5500 iZ+ i-Line Stepper is a Canon i-line stepper produced in 2004 and compatible with 12-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 5500 iZ+ i-Line Stepper	i-line	2004–2004	—	Equipment inventory listing[2]
   FPA 5500 iZ	i-line	2001	Listed as Canon FPA 5500 iZ i-Line Stepper - 350nm.	Equipment inventory listing[3]
   FPA 5500 iZ i-Line	—	2001	Uses 350nm wavelength, earlier vintage 2001	Equipment inventory listing[3]

3. FPA 5500 iZa i-Line

   The Canon FPA 5500 iZa is an i-line stepper lithography system for 8-inch wafers.

4. 

   FPA 5500 iZa MUV

   The Canon FPA 5500 iZa MUV is a stepper from 2006, configured with a 1 RBC PPC RH, 1WH; WTC Reject Carrier, 1 Shutter, and 1 W chuck.

Sources