Waferpedia

Tool family

CHA 635

CHADeposition1 entry

The CHA 635 Modular Deposition Systems are described as versatile, scalable systems for sputtering and evaporation applications.

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Models in this family

  1. 635

    CHA Industries’ 635 Series modular deposition systems support both sputtering and evaporation for semiconductor and compound semiconductor wafer coating.

    Cited variants

    DesignationGenerationVintageChangesSource
    635/SL Module———web.archive.org[1]
    635/DL Module———web.archive.org[1]
    635/RL Module———web.archive.org[1]
    635/SL———web.archive.org[1]
    635/DL———web.archive.org[1]
    635/RL———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org