Waferpedia

Tool family

Disco DCS

DiscoWet Processing / Clean2 entries
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Models in this family

  1. DCS 1440 Wafer Cleaner Spin

    The Disco DCS 1440 is an automatic cleaning system used to clean workpieces after dicing, supporting up to 8-inch wafers.

  2. DCS 1460 Wafer Cleaner Spin

    The DISCO DCS1460 is an automatic cleaning system for Φ300 mm wafers used to clean workpieces that have been cut on a dicing saw.

All entries

  1. DCS 1440 Wafer Cleaner SpinDisco

    The Disco DCS 1440 is an automatic cleaning system used to clean workpieces after dicing, supporting up to 8-inch wafers.

    CategoryWet Processing / Clean
    18 specs
  2. DCS 1460 Wafer Cleaner SpinDisco

    The DISCO DCS1460 is an automatic cleaning system for Φ300 mm wafers used to clean workpieces that have been cut on a dicing saw.

    CategoryWet Processing / Clean
    14 specs