Waferpedia

Tool family

Disco Dicing

Disco Dicing Saw.

Models in this family

  1. Disco dicing saw handles up to 8 inch substrates and is used for dicing silicon, bonded Si wafers, and glasses.

    Cited variants

    DesignationGenerationVintageChangesSource
    DAD3220——Automatic dicing saw with auto-alignment, auto-focus, auto-kerf check, 4 cutting channels with 320 degree max rotating angle, cutting blades thickness 100-400 micron, max substrate size 6” wafers or 6”x6” substrates, 160mm x 162mm cutting range, <0.005/160 positioning accuracy, 1.5 kW spindle at 30,000 per minute.ece.utoronto.ca[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ece.utoronto.caece.utoronto.ca