Waferpedia

Tool family

Espec HRS-600HS-20

Espec1 entry

The ESPEC HRS-600HS-20 is a rapid-rate thermal cycle chamber with temperature and humidity control.

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Models in this family

  1. HRS-600HS-20

    The ESPEC HRS-600HS-20 is a rapid-rate thermal cycle chamber with temperature and humidity control.