Waferpedia

Tool family

Headway PWM30

HeadwayThermal / Diffusion1 entry

The Headway PWM30 is a photoresist spin/bake hood with adjustable spin speeds from 50 to 10,000 RPM, microprocessor control, and an LCD interface.

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Models in this family

  1. PWM30

    The Headway PWM30 is a photoresist spin/bake hood with adjustable spin speeds from 50 to 10,000 RPM, microprocessor control, and an LCD interface.