Waferpedia

Tool family

KLA 4PP-TypeH

KLA1 entry

The KLA 4PP-TypeH is a four-point probe model listed among KLA Instruments' resistance probe products.

Models in this family

  1. The KLA 4PP-TypeH is a four-point probe with 0.6mm spacing, 200um tip radius, and 100gm force, designed for implant/high impedance surface measurement.