Tool family
KLA 7600 Patterned Wafer Particle Defect
KLA 7600 Patterned Wafer Particle Defect System.
Models in this family
The KLA 7600 Patterned Wafer Particle Defect is a metrology and inspection system configured for a 25 Wafer Slot Cassette.
Tool family
KLA 7600 Patterned Wafer Particle Defect System.
The KLA 7600 Patterned Wafer Particle Defect is a metrology and inspection system configured for a 25 Wafer Slot Cassette.
