KLA AIT

Models in this family

1. 

   AIT II Defect

   KLA AIT II Defect Inspection System is an 8-inch wafer inspection system with SECS/GEM CIM, a dual handler system, and an open cassette 2000 factory interface.

2. AIT UV Darkfield

   KLA AIT UV Darkfield Inspection is a darkfield inspection tool from KLA for 12-inch wafers.

3. AIT UV Darkfield Defect

   KLA AIT UV Darkfield Defect Inspection is an inspection tool identified by model AIT UV.