Tool family
KLA HRP 220
Models in this family
The KLA HRP 220 is a high-resolution surface profiler for metrology and inspection applications. The KLA HRP 220 measures total wafer flatness with better than 1 nm vertical resolution.
The KLA HRP 220 Surface is a surface profilometer.
All entries
- HRP 220KLA
The KLA HRP 220 is a high-resolution surface profiler for metrology and inspection applications. The KLA HRP 220 measures total wafer flatness with better than 1 nm vertical resolution.
CategoryMetrology & Inspection15 specs - HRP 220 ComputerKLACategoryMetrology & Inspection1 spec
- HRP 220 SurfaceKLA
The KLA HRP 220 Surface is a surface profilometer.
CategoryMetrology & Inspection4 specs