KLA P

Models in this family

1. 

   P 10

   The KLA P 10 is a profilometer in the metrology and inspection category.

2. 

   P 11 Surface

   The KLA P 11 Surface is a surface profilometer from KLA that measures roughness, waviness, step height, and other surface characteristics on wafers up to 8 inches (200 mm).

3. P 15 XP Surface

   The KLA P 15 XP is a surface profilometer described as an 8-inch wafer tool and noted as upgraded from the P-10.

4. 

   P 16 + Profiler

   KLA P 16 + Profiler is a metrology and inspection tool with listed wafer sizes from 2 inch to 12 inch.

5. 

   P 16 Surface

   The KLA P 16 Surface is a surface profilometer described as a fully refurbished unit with Windows XP, extended range up to 1 mm, and a 3D option.

6. 

   P 17 Surface

   The KLA P 17 Surface is a surface profilometer.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Tencor P-17 OF	—	—	Open Frame version with a bigger frame for larger samples; can be configured for 300 mm wafers or a 240 x 240 mm chuck.	kla.com[1]

7. 

   P 170 Surface
8. 

   P 2 Surface
9. 

   P 20 H Profiler

   The KLA P 20 H Profiler is a metrology and inspection tool categorized as a parts unit and part of the KLA P family.

10. 

    P 22 H Surface

    The KLA P 22 H Surface is a surface profilometer with step height precision, dual-view optics, and a motorized 200 mm diameter X-Y vacuum sample stage.

11. 

    P 22 Surface

    The KLA P 22 Surface is a surface profilometer.

12. 

    P 6 Surface

    The KLA P 6 is a surface profilometer.

Sources