Tool family
The KLA Puma 9120 is a dark-field defect detection tool for semiconductor wafer inspection. The KLA Puma 9120 is configured for 200 mm and 300 mm wafers and has two cameras.
The KLA Puma 9120 Darkfield Defect Inspection System is a wafer inspection system stated to support 8-inch and 12-inch wafers.
The KLA Puma 9120 Defect Inspection is a defect inspection system stated to support 8-inch and 12-inch wafers.
The KLA Puma 9120 is a dark-field defect detection tool for semiconductor wafer inspection. The KLA Puma 9120 is configured for 200 mm and 300 mm wafers and has two cameras.
The KLA Puma 9120 Darkfield Defect Inspection System is a wafer inspection system stated to support 8-inch and 12-inch wafers.
The KLA Puma 9120 Defect Inspection is a defect inspection system stated to support 8-inch and 12-inch wafers.