Waferpedia

Tool family

Laurell WS-650-23 B Spin

Laurell1 entry

Models in this family

  1. The Laurell WS-650-23 B is a compact spin coater for up to 150 mm wafers and 5"×5" substrates, with a maximum rotational speed of 12,000 RPM based on a 100 mm silicon wafer.