Oxford Instruments 800

Models in this family

1. 

   800

   The Oxford Instruments 800 is a plasma-enhanced chemical vapor deposition (PECVD) system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   800 Plus (Plasmalab800Plus)	—	—	Larger table (380 mm or 460 mm) and support for 300 mm wafers	nanofab.utah.edu[1]

Sources