Oxford Instruments Ionfab 300

Models in this family

1. 

   Ionfab 300 Plus

   The Oxford Instruments Ionfab 300 Plus is an ion beam etching and deposition system with SIMS endpoint detection, reported with wafer handling options from small samples to 8-inch wafers.

2. 

   Ionfab 300 Plus IBD

   Oxford Ionfab 300 Plus IBD is an ion beam deposition system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Ionfab 300 Plus IBD / IBE	—	—	Combined ion beam deposition and ion beam etching configuration for 6-inch to 8-inch wafers	waferpedia.com[1]

3. 

   Ionfab 300 Plus IBD IBE

   Oxford Instruments Ionfab 300 Plus IBD / IBE Tool is an ion beam deposition and ion beam etching system for 6-inch to 8-inch wafers.

Sources