Waferpedia

Tool family

Pfeiffer TMU 064

Pfeiffer2 entries

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    TMH 064——Listed as a related TMH/TMU 064 specification variant with DN 40 ISO-KF inlet in the specification table.ptbsales.com[1]
    TMU 064 U SG DN 63 CF-F——Listed as a configuration option.ptbsales.com[1]

All entries

  1. TMU 064 P TurboPfeiffer
    12 specs
  2. TMU 064 TurbomolecularPfeiffer
    38 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]ptbsales.comptbsales.com