Pfeiffer TPU

Models in this family

1. 

   TPU 050 Turbomolecular Vacuum

   The Pfeiffer TPU 050 is a turbomolecular vacuum pump manufactured by Pfeiffer.

2. 

   TPU 060 Turbomolecular Vacuum

   The Pfeiffer TPU 060 is a turbomolecular vacuum pump.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TPU 060 Mod PM P 01 401	—	—	Modification code PM P 01 401	Equipment inventory listing[1]

3. 

   TPU 100 High Vacuum Turbo

   The Pfeiffer TPU 100 is a high vacuum turbo pump with a pumping speed of 110 l/s and an oil filling of 2 x 6 cm3.

4. 

   TPU 170 Turbomolecular

   The Pfeiffer TPU 170 is a turbomolecular vacuum pump with a pumping speed of 170 l/s.

5. 

   TPU 510 Turbomolecular Vacuum

   The Pfeiffer TPU 510 Turbomolecular Vacuum Pump is a turbo pump with a DN 160 CF-F inlet flange and a fore-vacuum flange DN 40 KF. The Pfeiffer TPU 510 Turbomolecular Vacuum Pump is specified with a nitrogen pumping speed of 500 l/s and a mass of 30 kg.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TPU 510 C	—	—	Plasma corrosive turbo pump version.	ajvs.com[2]

Sources