Waferpedia

Tool family

Rigaku 3640 Wafer Disk Analyzer

Rigaku1 entry

Models in this family

  1. 3640 Wafer Disk Analyzerproduced 1977–

    The Rigaku 3640 Wafer Disk Analyzer is a wafer and disk analyzer with an 8 inch wafer size and a sample chamber for 8 inch maximum samples.