The SPTS / STS MACS ICP is an 8-inch etcher with an HR chamber and cassette-to-cassette MACS loader.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| MACS ICP HR | — | 2001 | HR etch system variant; sources describe it as an HR dry etch system. | hommer.com.tw[1] |