Waferpedia

Tool family

SUSS MicroTec GAMMA

SUSS MicroTec4 entries

Models in this family

  1. The SUSS MicroTec Gamma is an automated photoresist and wet processing system for clean, reliable, and high-throughput photolithography processing.

  2. The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.

  3. The SUSS MicroTec Gamma Spray is a spray coater.

All entries

  1. GammaSUSS MicroTec

    The SUSS MicroTec Gamma is an automated photoresist and wet processing system for clean, reliable, and high-throughput photolithography processing.

    4 specs
  2. Gamma 200 SpraySUSS MicroTec
    20 specs
  3. GAMMA ResistSUSS MicroTec

    The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.

    CategoryLithography
    1 spec
  4. Gamma SpraySUSS MicroTec

    The SUSS MicroTec Gamma Spray is a spray coater.

    9 specs