Tool family
The Tegal 6500 HRe- is a dual-frequency etch system series for plasma etching. The Tegal 6500 HRe- uses high-density, capacitively coupled plasma generation and magnetic plasma confinement for precise etching down to the sub-micron level.
The Tegal 6500 HRe- is a dual-frequency etch system series for plasma etching. The Tegal 6500 HRe- uses high-density, capacitively coupled plasma generation and magnetic plasma confinement for precise etching down to the sub-micron level.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 6510 | — | — | Capable of gate etching in polysilicon and shallow trench isolation; can etch features as small as 90 nm on nitride and oxide hard masks. | plasmatherm.com[1] |
| 6520 | — | — | Can etch aluminum alloys down to the sub-micron level; includes a rinse-strip-rinse procedure; useful for aluminum alloy interconnects and metallization layers; can anisotropically etch thick layers greater than 2 microns. | plasmatherm.com[1] |
| 6540 | — | — | Designed for high dielectric coefficient materials, platinum and iridium electrodes, gold interconnects, and other difficult-to-etch materials including PZT, SBT, and BST; features as small as 90 nm can be etched. | plasmatherm.com[1] |