Waferpedia

Tool family

Tegal 981ACS

TegalEtch1 entry

The Tegal 981ACS is a scaled-up version of the 901ACS diode RIE system built for handling 150 mm and 200 mm wafers and large-area etching operations.

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Models in this family

  1. 981ACS

    The Tegal 981ACS is a scaled-up version of the 901ACS diode RIE system built for handling 150 mm and 200 mm wafers and large-area etching operations.