Tokyo Electron Formula

Models in this family

1. Formula

   Tokyo Electron Formula is a furnace with source-listed 12-inch wafer size and applications including TEOS, HF, F2, DCS, NH3, and SiN.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   12-inch TEOS / HF / F2 configuration	—	2002	Configured for TEOS / HF / F2 processing on 12-inch wafers	Equipment inventory listing[1]
   12-inch DCS / NH3 / HF / F2 configuration	—	2002	Configured for DCS / NH3 / HF / F2 processing on 12-inch wafers	Equipment inventory listing[2]
   DCS SiN configuration	—	—	Configured for DCS SiN deposition	Equipment inventory listing[3]
   Formula TEOS / HF / F2	—	2002	Configured for TEOS, HF, and F2 chemistries	Equipment inventory listing[1]
   Formula DCS / NH3 / HF / F2	—	2002	Configured for DCS, NH3, HF, and F2 chemistries	Equipment inventory listing[2]
   Formula DCS SiN	—	—	Configured for DCS silicon nitride deposition	Equipment inventory listing[3]

Sources