Tool family
The Tokyo Electron Formula Vertical is a vertical diffusion furnace used for thermal processing and chemical vapor deposition (CVD) on 300 mm wafers, with available process variants including silicon nitride, DCS/NH3/HF/F2, and TEOS/HF/F2.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| FORMULA VERTICAL FURNACE, ALD HIGH K(H TYPE) PROCESS | — | — | configured for ALD high-k (H type) process | fabsurplus.com[1] |
| FORMULA VERTICAL FURNACE, DCS SiN PROCESS | — | — | configured for DCS SiN (silicon nitride) process | fabsurplus.com[1] |
| FORMULA Vertical Furnace, DCS/NH3/HF/F2 | — | — | configured for DCS/NH3/HF/F2 chemistry | fabsurplus.com[2] |
| FORMULA VERTICAL FURNACE, TEOS/HF/F2 PROCESS | — | — | configured for TEOS/HF/F2 process | fabsurplus.com[1] |
| FORMULA VERTICAL FURNACE, DCS SiN(H TYPE) PROCESS | — | — | configured for DCS SiN (H type) process | fabsurplus.com[1] |
| FORMULA VERTICAL FURNACE, DCS SiN(M TYPE) PROCESS | — | — | configured for DCS SiN (M type) process | fabsurplus.com[1] |
| FORMULA VERTICAL FURNACE, H TYPE PROCESS | — | — | configured for H type process | fabsurplus.com[1] |
| FORMULA VERTICAL FURNACE, Teos(H TYPE) PROCESS | — | — | configured for Teos (H type) process | fabsurplus.com[1] |