Waferpedia

Tool family

Tokyo Electron NS300Z

Tokyo ElectronWet Processing / Clean1 entry

Tokyo Electron NS300Z is a scrubber system for 300mm wafers, featuring process modules with proven reliability and stability, and offering further productivity improvements.

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Models in this family

  1. NS300Z

    Tokyo Electron NS300Z is a scrubber system for 300mm wafers, featuring process modules with proven reliability and stability, and offering further productivity improvements.