Tool family
The Tystar 8300 is listed as a tube furnace in the thermal processing section of the UCSB Nanofab tool list.
The Tystar 8300 is a tube furnace used for thermal processing, including oxidation, annealing, and spin-on glass curing.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tube 1 | — | — | Various applications; supports SOG425.001, ALGAAS.001, and ANNEAL.001. | wiki.nanotech.ucsb.edu[1] |
| Tube 2 | — | — | For cleaned silicon only; supports WET1050.002, DRY1050.002, WETVAR.002, and DRYVAR.002. | wiki.nanotech.ucsb.edu[1] |
| Tube 3 | — | — | For processed silicon or other anneals; supports WET1050.003, DRY1050.003, WETVAR.003, DRYVAR.003, and ANNEAL.003. | wiki.nanotech.ucsb.edu[1] |