Waferpedia

Tool family

Ultratech LSA100

UltratechThermal / Diffusion1 entry

The Ultratech LSA100 is a laser spike annealing system in Ultratech's Laser Processing line.

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Models in this family

  1. LSA100introduced 2004

    The Ultratech LSA100 is a laser spike annealing system in Ultratech's Laser Processing line.