Waferpedia

Tool family

Yaskawa XU RCM 9205 Atmospheric Wafer Robot

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Models in this family

  1. XU RCM 9205 Atmospheric Wafer Robot

    The Yaskawa XU RCM 9205 is an atmospheric wafer robot for 12-inch wafers, supplied with an ERCR-NS01-A003 controller and compatible with KLA equipment.