Waferpedia

Tool family

YES 253B-2-3CF-2

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve for regulating gas removal from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve for regulating gas removal from a vacuum chamber when used with an MKS controller.

    Cited variants

    DesignationGenerationVintageChangesSource
    253B-2-3CF-2——CF-flange configuration shown in the manual's dimensions section.nanofab.utah.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu